DocumentCode :
1625592
Title :
Low temperature grown GaAs materials and devices: present status and trends
Author :
Kohn, Erhard ; Lipka, Klaus-Michael
Author_Institution :
Dept. of Electron. Devices & Circuits, Ulm Univ., Germany
fYear :
1995
Firstpage :
107
Lastpage :
110
Abstract :
GaAs layers can be grown epitaxially over a wide range of temperature reaching from 180°C up to the thermal stability limit. While above 400°C growth temperature the stoichiometry is preserved within the ppm-range, at low growth temperature surplus As can be incorporated into the GaAs matrix within the percentage range. The material grown in this lower temperature range is called Low-Temperature-Grown (LTG) GaAs. By high temperature annealing the solubility limit will be surpassed and most of the excess As precipitates. Thus, the material can have a variety of unusual properties. The first application was in the FET buffer layer structure virtually eliminating backgating and short channel effects. Using LTG-GaAs, the stability of GaAs FET devices has been improved dramatically and the Schottky gate breakdown limit has been surpassed for the first time. The second successful application is ultrafast THz optoelectronic switches and detectors. In this paper the advances in FET´s are reviewed
Keywords :
III-V semiconductors; annealing; diffusion barriers; field effect transistors; gallium arsenide; optoelectronic devices; passivation; semiconductor epitaxial layers; semiconductor growth; vapour phase epitaxial growth; 180 to 250 C; FET devices; GaAs; GaAs devices; MESFET; MISFET; Schottky gate breakdown; VPE; epitaxial growth; high temperature annealing; low temperature grown GaAs materials; ultrafast THz optoelectronic switches; ultrafast optoelectronic detectors; Conducting materials; Conductivity; Electric breakdown; Gallium arsenide; Lattices; Magnetic materials; Optical materials; Semiconductor materials; Superconducting materials; Temperature distribution;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Signals, Systems, and Electronics, 1995. ISSSE '95, Proceedings., 1995 URSI International Symposium on
Conference_Location :
San Francisco
Print_ISBN :
0-7803-2516-8
Type :
conf
DOI :
10.1109/ISSSE.1995.497944
Filename :
497944
Link To Document :
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