DocumentCode
1625789
Title
Accurate post-fabrication trimming of silicon resonators
Author
Atabaki, Amir H. ; Askari, Murtaza ; Eftekhar, Ali A. ; Adibi, Ali
Author_Institution
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fYear
2012
Firstpage
42
Lastpage
44
Abstract
We experimentally demonstrate an accurate high-throughput post-fabrication trimming technique for silicon-based photonic devices using a single fabrication step. Using this technique, we reduce the random resonance wavelength variation of ultra-compact silicon resonators by a factor of six.
Keywords
integrated optics; optical fabrication; optical resonators; optical waveguides; silicon-on-insulator; Si; high-throughput post-fabrication trimming; random resonance wavelength; silicon-based photonic devices; single fabrication step; ultracompact silicon resonators; Etching; Films; Optical device fabrication; Optical resonators; Photonics; Silicon; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
Conference_Location
San Diego, CA
ISSN
1949-2081
Print_ISBN
978-1-4577-0826-8
Type
conf
DOI
10.1109/GROUP4.2012.6324080
Filename
6324080
Link To Document