Title :
A high performance MEMS miniature tunable bandpass filter
Author :
Abbaspour-Tamijani, A. ; Dussopt, L. ; Rebeiz, G.M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
A miniature tunable 3-pole filter is fabricated using coplanar waveguide (CPW) transmission-tines on glass substrate (C/sub r/ = 4.6, tan /spl delta/ = 0.006) and an array of RF-MEMS varactors. The filter is tuned using a bias voltage of 0-80 Volts. The filter is /spl sim/3.6 mm long and gives a near ideal frequency response. A tuning range of 14% from 18.6 to 21.4 GHz was achieved, with a constant fractional bandwidth of 7.4 /spl plusmn/ 0.1% and a mid-band insertion loss of 3.85-4.15 dB.
Keywords :
band-pass filters; circuit tuning; coplanar waveguide components; frequency response; losses; micromechanical devices; varactors; waveguide filters; 18.6 to 21.4 GHz; 3-pole filter; 3.85 to 4.15 dB; RF-MEMS varactors; bias voltage; constant fractional bandwidth; coplanar waveguide transmission-tines; mid-band insertion loss; miniature tunable bandpass filter; near ideal frequency response; tuning range; Band pass filters; Coplanar waveguides; Filter bank; Frequency response; Glass; Micromechanical devices; Radiofrequency microelectromechanical systems; Tuning; Varactors; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2003 IEEE MTT-S International
Conference_Location :
Philadelphia, PA, USA
Print_ISBN :
0-7803-7695-1
DOI :
10.1109/MWSYM.2003.1210486
