Title :
Single trench waveguide TE-TM mode converter fabricated with SiON
Author :
Nakayama, Kenichi ; Shoji, Yuya ; Mizumoto, Tetsuya
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
Abstract :
A TE-TM mode converter constructed with a single trench SiON waveguide is described. The device is fabricated in a single mask and etching process. TE-TM mode conversion efficiency of 97% has been achieved.
Keywords :
etching; masks; optical fabrication; optical waveguides; silicon compounds; SiON; TE-TM mode converter; device fabrication; etching; mode conversion efficiency; single mask; single trench SiON waveguide; Etching; Optical device fabrication; Optical waveguides; Rectangular waveguides; Silicon; Wavelength measurement; Wires; SiON waveguide; TE-TM mode conversion; silicon photonic circuit;
Conference_Titel :
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0826-8
DOI :
10.1109/GROUP4.2012.6324103
