• DocumentCode
    1626468
  • Title

    Substrate effects on metal-oxide single electron transistors electrometer measurements.

  • Author

    George, Hubert C. ; Orlov, Alexei O. ; Snider, Gregory L.

  • Author_Institution
    Dept. of Electr. Eng., Univ. of Notre Dame, Notre Dame, IN, USA
  • fYear
    2010
  • Firstpage
    109
  • Lastpage
    110
  • Abstract
    This work presents the response of SETs silicon, quartz, and sapphire substrates to applied potential on a second gate SET gate. The SETs used are fabricated using electron beam (e-beam) lithography and the Dolan bridge technique. Measurements are performed at temperature range of 0.3 4.2 K. We observed a breakdown in compensation (seen as CBOs with varied period) in devices on Si substrates but not in devices on the insulating wide bandgap substrates, quartz and sapphire, which have no mobile charges. In these substrates it is possible to achieve an almost ideal charge cancellation over a large range of gate voltages (tens of volts).
  • Keywords
    electron beam lithography; single electron transistors; substrates; Dolan bridge technique; SET silicon; charge cancellation; e-beam lithography; electrometer measurement; electron beam; metal-oxide single electron transistor; quartz; sapphire substrate; substrate effect; wide bandgap substrate;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference (DRC), 2010
  • Conference_Location
    South Bend, IN
  • ISSN
    1548-3770
  • Print_ISBN
    978-1-4244-6562-0
  • Electronic_ISBN
    1548-3770
  • Type

    conf

  • DOI
    10.1109/DRC.2010.5551860
  • Filename
    5551860