DocumentCode
1626468
Title
Substrate effects on metal-oxide single electron transistors electrometer measurements.
Author
George, Hubert C. ; Orlov, Alexei O. ; Snider, Gregory L.
Author_Institution
Dept. of Electr. Eng., Univ. of Notre Dame, Notre Dame, IN, USA
fYear
2010
Firstpage
109
Lastpage
110
Abstract
This work presents the response of SETs silicon, quartz, and sapphire substrates to applied potential on a second gate SET gate. The SETs used are fabricated using electron beam (e-beam) lithography and the Dolan bridge technique. Measurements are performed at temperature range of 0.3 4.2 K. We observed a breakdown in compensation (seen as CBOs with varied period) in devices on Si substrates but not in devices on the insulating wide bandgap substrates, quartz and sapphire, which have no mobile charges. In these substrates it is possible to achieve an almost ideal charge cancellation over a large range of gate voltages (tens of volts).
Keywords
electron beam lithography; single electron transistors; substrates; Dolan bridge technique; SET silicon; charge cancellation; e-beam lithography; electrometer measurement; electron beam; metal-oxide single electron transistor; quartz; sapphire substrate; substrate effect; wide bandgap substrate;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference (DRC), 2010
Conference_Location
South Bend, IN
ISSN
1548-3770
Print_ISBN
978-1-4244-6562-0
Electronic_ISBN
1548-3770
Type
conf
DOI
10.1109/DRC.2010.5551860
Filename
5551860
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