Title :
Low-loss low-crosstalk silicon rib waveguide crossing with tapered multimode-interference design
Author :
Luo, Ying ; Li, Guoliang ; Zheng, Xuezhe ; Yao, Jin ; Thacker, Hiren ; Lee, Jin-Hyoung ; Cunningham, John E. ; Raj, Kannan ; Krishnamoorthy, Ashok V.
Author_Institution :
Oracle Labs., Oracle, San Diego, CA, USA
Abstract :
We report the design and fabrication of silicon rib-waveguide crossings based on taper-integrated multimode-interference. Measured devices built in a 130nm SOI CMOS process showed an insertion loss of 0.1dB/crossing, and an extracted crosstalk below -35dB.
Keywords :
CMOS integrated circuits; optical crosstalk; optical design techniques; optical fabrication; optical losses; optical waveguides; rib waveguides; silicon; SOI CMOS process; crosstalk; design; fabrication; insertion loss; silicon rib waveguide crossing; size 130 nm; tapered multimode-interference design; Crosstalk; Gratings; Insertion loss; Optical losses; Optical waveguides; Silicon;
Conference_Titel :
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0826-8
DOI :
10.1109/GROUP4.2012.6324116
