Title :
Microwave coplanar filters on Si substrates
Author :
Chan, K.T. ; Chin, A. ; Kuo, J.T. ; Chang, C.Y. ; Duh, D.S. ; Lin, W.J. ; Chunxiang Zhu ; Li, M.F. ; Dim-Lee Kwong
Author_Institution :
Dept. of Electron. Eng, Nat. Chiao Tung Univ, Hsinchu, Taiwan
Abstract :
High performance band-pass and band-stop microwave coplanar filters operating from 22 to 94 GHz have been realized on Si substrates using a proton implantation process. Very good insertion loss and filter characteristics close to ideal EM simulation are measured that demonstrate excellent filter performance to 91 GHz.
Keywords :
band-pass filters; band-stop filters; coplanar waveguide components; equivalent circuits; field effect MMIC; ion implantation; microwave filters; millimetre wave filters; waveguide filters; 22 to 94 GHz; CMOS MMICs; Si; Si substrates; broadband filters; coplanar waveguide structure; equivalent circuit model; equivalent-circuit simulated characteristics; filter characteristics; high performance band-pass filters; high performance band-stop filters; ideal EM simulation; insertion loss; microwave coplanar filters; proton implantation process; Band pass filters; Coplanar waveguides; High performance computing; Loss measurement; Microwave communication; Microwave filters; Performance loss; Protons; Radio frequency; Resonator filters;
Conference_Titel :
Microwave Symposium Digest, 2003 IEEE MTT-S International
Conference_Location :
Philadelphia, PA, USA
Print_ISBN :
0-7803-7695-1
DOI :
10.1109/MWSYM.2003.1210531
