Title :
RF actuation of capacitive MEMS switches
Author :
Reid, J.R. ; Starman, L.A. ; Webster, R.T.
Author_Institution :
Antenna Technol. Branch, Air Force Res. Lab., Hanscom AFB, MA, USA
Abstract :
An analytical calculation of microwave actuation for shunt capacitive MEMS switches is presented. This calculation shows that the microwave signal deflects the beam according to the RMS voltage of the signal. In addition, heating of the beam due to dissipated microwave power is shown to play a significant role in microwave actuation.
Keywords :
capacitance; microswitches; microwave switches; temperature distribution; DC pull-in voltage; RF actuation; RMS voltage; analytical calculation; beam heating; capacitive MEMS switches; dissipated microwave power; equivalent thermal circuit; microwave actuation; microwave signal beam deflection; power handling capacity; shunt capacitive MEMS switches; thermal heating; Bridge circuits; Cogeneration; Electromagnetic heating; Equations; Microswitches; Radio frequency; Switches; Temperature; Thermal stresses; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2003 IEEE MTT-S International
Conference_Location :
Philadelphia, PA, USA
Print_ISBN :
0-7803-7695-1
DOI :
10.1109/MWSYM.2003.1210533
