On the corrupting influence of variability in semiconductor manufacturing

Author

Schoemig, Alexander K.

Author_Institution

Infineon Technol. AG, Regensburg, Germany

Volume

1

fYear

1999

fDate

6/21/1905 12:00:00 AM

Firstpage

837

Abstract

This paper describes two simulation experiments using a model of a real medium sized multi-product semiconductor chip fabrication facility. The results presented clearly show the corrupting influence of variability, in this case caused by machine and tool unavailability. The immediate conclusion out of the results is that reducing the inherent variability of a manufacturing system improves the overall system performance. Hence, sampling shop-floor data should not only include first order statistics, but also measures that allow to monitor and model the variability of the machinery

Keywords

computer integrated manufacturing; digital simulation; semiconductor device manufacture; statistics; first order statistics; machine unavailability; multiproduct semiconductor chip fabrication; semiconductor manufacturing; shop-floor data sampling; simulation experiments; system performance; tool unavailability; variability; Chip scale packaging; Electronic circuits; Integrated circuit measurements; Manufacturing processes; Production facilities; Productivity; Semiconductor device manufacture; Semiconductor device measurement; Testing; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Simulation Conference Proceedings, 1999 Winter

Conference_Location

Phoenix, AZ

Print_ISBN

0-7803-5780-9

Type

conf

DOI

10.1109/WSC.1999.823295

Filename

823295