Title :
Miniaturized laser Doppler vibrometers integrated on silicon-on-insulator with thermo-optic serrodyne optical frequency shifter
Author :
Li, Yanlu ; Verstuyft, Steven ; Yurtsever, Gunay ; Keyvaninia, Shahram ; Roelkens, Gunther ; Van Thourhout, Dries ; Baets, Roel
Author_Institution :
INTEC Dept., Ghent-Univ. - IMEC, Ghent, Belgium
Abstract :
A miniaturized heterodyne laser Doppler vibrometer integrated on silicon-on-insulator is reported and compared with a commercial LDV. The optical frequency shift was realized by applying the serrodyne method on a thermo-optic phase modulator.
Keywords :
Doppler measurement; integrated optoelectronics; measurement by laser beam; optical modulation; phase modulation; silicon-on-insulator; thermo-optical devices; vibration measurement; Si; integrated silicon-on-insulator; miniaturized laser Doppler vibrometers; serrodyne method; thermo-optic phase modulator; thermo-optic serrodyne optical frequency shifter; Integrated optics; Optical device fabrication; Optical interferometry; Optical modulation; Optical sensors; System-on-a-chip; Vibrations;
Conference_Titel :
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0826-8
DOI :
10.1109/GROUP4.2012.6324139
