Title :
CMOS-compatible Tungsten heaters for silicon photonic waveguides
Author :
Masood, A. ; Pantouvaki, M. ; Goossens, D. ; Lepage, G. ; Verheyen, P. ; Van Thourhout, Dries ; Absil, P. ; Bogaerts, W.
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Ghent, Belgium
Abstract :
We present a Tungsten thermo-optic tuner on SOI, using standard CMOS back-end fabrication processes. Tuning efficiency of 35.2mW/FSR was achieved on ring resonators with 10%-90% heating time of 2.8μs.
Keywords :
CMOS integrated circuits; elemental semiconductors; optical resonators; optical waveguides; silicon; thermo-optical devices; CMOS-compatible tungsten heaters; SOI; heating time; ring resonators; silicon photonic waveguides; thermo-optic tuner; CMOS integrated circuits; Fabrication; Heating; Optical waveguides; Photonics; Silicon; Tungsten; CMOS; Integration; Silicon photonics; thermo-optic tuning;
Conference_Titel :
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0826-8
DOI :
10.1109/GROUP4.2012.6324144
