• DocumentCode
    1627653
  • Title

    CMOS-compatible Tungsten heaters for silicon photonic waveguides

  • Author

    Masood, A. ; Pantouvaki, M. ; Goossens, D. ; Lepage, G. ; Verheyen, P. ; Van Thourhout, Dries ; Absil, P. ; Bogaerts, W.

  • Author_Institution
    Dept. of Inf. Technol., Ghent Univ., Ghent, Belgium
  • fYear
    2012
  • Firstpage
    234
  • Lastpage
    236
  • Abstract
    We present a Tungsten thermo-optic tuner on SOI, using standard CMOS back-end fabrication processes. Tuning efficiency of 35.2mW/FSR was achieved on ring resonators with 10%-90% heating time of 2.8μs.
  • Keywords
    CMOS integrated circuits; elemental semiconductors; optical resonators; optical waveguides; silicon; thermo-optical devices; CMOS-compatible tungsten heaters; SOI; heating time; ring resonators; silicon photonic waveguides; thermo-optic tuner; CMOS integrated circuits; Fabrication; Heating; Optical waveguides; Photonics; Silicon; Tungsten; CMOS; Integration; Silicon photonics; thermo-optic tuning;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
  • Conference_Location
    San Diego, CA
  • ISSN
    1949-2081
  • Print_ISBN
    978-1-4577-0826-8
  • Type

    conf

  • DOI
    10.1109/GROUP4.2012.6324144
  • Filename
    6324144
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1627653