Title :
A model of a 300 mm wafer fabrication line
Author :
Campbell, Philip L. ; Rohan, Darius ; MacNair, Edward A.
Author_Institution :
Div. of Microelectron., IBM Corp., East Fishkill, NY, USA
fDate :
6/21/1905 12:00:00 AM
Abstract :
Semiconductor factories are very expensive to build and operate. It is critical to understand how to design and operate them efficiently. We describe a simulation model of a planned 300-mm wafer fabrication line that we are using to make strategic decisions related to the factory
Keywords :
integrated circuit manufacture; simulation; strategic planning; 300 mm; planning; semiconductor factories; semiconductor wafer fabrication line; simulation model; strategic decisions; Fabrication; Materials handling; Metrology; Microelectronics; Production facilities; Routing; Sampling methods; Semiconductor device modeling; Vehicles; Virtual manufacturing;
Conference_Titel :
Simulation Conference Proceedings, 1999 Winter
Conference_Location :
Phoenix, AZ
Print_ISBN :
0-7803-5780-9
DOI :
10.1109/WSC.1999.823305
