Title :
Silicon-on-insulator phased-array waveguide grating WDM filter
Author :
Trinh, P.D. ; Yegnanarayanan, S. ; Coppinger, F. ; Jalali, B.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Silicon-on-insulator (SOI) technology offers tremendous potential for realization of low-cost WDM components that are truly compatible with the silicon-integrated circuit technology. In this paper, we present the design, fabrication, and performance of a four-channel phased-array wavelength mux/demux in the SOI technology
Keywords :
multiplexing equipment; optical communication equipment; optical couplers; optical fabrication; optical fibre networks; optical planar waveguides; optical waveguide filters; photolithography; rib waveguides; silicon-on-insulator; sputter etching; wavelength division multiplexing; BESOI wafer; RIE; SOI technology; Si-SiO2; design; fabrication; four-channel; low-cost WDM components; pattern formation; performance; phased-array waveguide grating WDM filter; phased-array wavelength mux/demux; photolithography; rib waveguides; slab waveguide star couplers; Arrayed waveguide gratings; Couplers; Etching; Filters; Optical fiber communication; Optical fibers; Optical waveguides; Silicon on insulator technology; Wavelength division multiplexing; Wavelength measurement;
Conference_Titel :
Optical Fiber Communication. OFC 97., Conference on
Conference_Location :
Dallas, TX
Print_ISBN :
1-55752-480-7
DOI :
10.1109/OFC.1997.719910
