Silicon-on-insulator phased-array waveguide grating WDM filter

Author

Trinh, P.D. ; Yegnanarayanan, S. ; Coppinger, F. ; Jalali, B.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

fYear

1997

Firstpage

301

Lastpage

302

Abstract

Silicon-on-insulator (SOI) technology offers tremendous potential for realization of low-cost WDM components that are truly compatible with the silicon-integrated circuit technology. In this paper, we present the design, fabrication, and performance of a four-channel phased-array wavelength mux/demux in the SOI technology

Keywords

multiplexing equipment; optical communication equipment; optical couplers; optical fabrication; optical fibre networks; optical planar waveguides; optical waveguide filters; photolithography; rib waveguides; silicon-on-insulator; sputter etching; wavelength division multiplexing; BESOI wafer; RIE; SOI technology; Si-SiO₂; design; fabrication; four-channel; low-cost WDM components; pattern formation; performance; phased-array waveguide grating WDM filter; phased-array wavelength mux/demux; photolithography; rib waveguides; slab waveguide star couplers; Arrayed waveguide gratings; Couplers; Etching; Filters; Optical fiber communication; Optical fibers; Optical waveguides; Silicon on insulator technology; Wavelength division multiplexing; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Fiber Communication. OFC 97., Conference on

Conference_Location

Dallas, TX

Print_ISBN

1-55752-480-7

Type

conf

DOI

10.1109/OFC.1997.719910

Filename

719910