Title :
The state-of-the-art of RF capacitive tunable components (Invited)
Author :
Huang, Cong ; Buisman, Koen ; Nanver, Lis K. ; De Vreede, Leo C N
Author_Institution :
Delft Inst. of Microsyst. & Nanoelectron., Delft Univ. of Technol., Delft, Netherlands
Abstract :
An overview is given for the current state-of-the-art of tunable RF elements. For this purpose, tunable RF elements such as thin-film Barium Strontium Titanate (BST) varactors, Micro Electro Mechanical Systems (MEMS) based capacitive switch banks and varactors, as well as semiconductor based capacitive switch banks and varactors are reviewed. Their benefits and shortcomings are discussed and compared for various applications.
Keywords :
microswitches; varactors; RF capacitive tunable components; capacitive switch banks; micro electro mechanical systems; thin-film barium strontium titanate varactors; tunable RF elements; Capacitance; Micromechanical devices; Q factor; Radio frequency; Switches; Tuning; Varactors;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-5797-7
DOI :
10.1109/ICSICT.2010.5667304
