Title :
High-fidelity photonic building blocks fabricated using thermal nanoimprint lithography (T-NIL)
Author :
Askari, Murtaza ; Atabaki, Amir H. ; Eftekhar, Ali A. ; Adibi, Ali
Author_Institution :
Sinoora Inc., Atlanta, GA, USA
Abstract :
We demonstrate high-fidelity photonic patterns, feature sizes (80nm to 3μm), using T-NIL. Appropriate CAD file design allows complete elimination of residual layer. Our fabricated ultra-compact microdisk resonators show similar quality factors to e-beam written samples.
Keywords :
CAD; integrated optics; micromechanical resonators; nanolithography; CAD file design; T-NIL; e-beam; high-fidelity photonic building blocks; quality factors; residual layer; size 80 nm to 3 mum; thermal nanoimprint lithography; ultra-compact microdisk resonators; Fabrication; Lithography; Optical resonators; Optical waveguides; Photonics; Resists; Silicon;
Conference_Titel :
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0826-8
DOI :
10.1109/GROUP4.2012.6324161
