Title :
On the modeling of dielectric charging in RF-MEMS capacitive switches
Author :
Papaioannou, George ; Coccetti, Fabio ; Plana, Robert
Author_Institution :
CNRS, LAAS, Toulouse, France
Abstract :
The dielectric charging in RF MEMS capacitive switches is modeled. The modeling focus on charge injections processes and the calculations start from first principles. The calculations were performed on materials with uniform and exponential distribution of defects. The time and bias dependence of distribution of injected charges are derived. The dielectric charging/polarization build-up is derived and found to obey the stretched exponential law, a result being supported by experimental data in various dielectrics.
Keywords :
capacitor switching; microswitches; RF-MEMS capacitive switches; charge injections; defects; dielectric charging; exponential distribution; injected charges; polarization; uniform distribution; Dielectric constant; Dielectric devices; Dielectric materials; Dielectrics and electrical insulation; Micromechanical devices; Microswitches; Polarization; Radiofrequency microelectromechanical systems; Switches; Voltage; Dielectrics; MEMS lifetime; capacitive switches; dielectric charging; reliability;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems (SiRF), 2010 Topical Meeting on
Conference_Location :
New Orleans, LA
Print_ISBN :
978-1-4244-5456-3
DOI :
10.1109/SMIC.2010.5422970
