Title :
Vertertical integration of silicon nitride on siliconon-insulator platform
Author :
Li, Qing ; Eftekhar, Ali A. ; Sodagar, Majid ; Atabaki, Amir H. ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We propose to integrate silicon nitride on silicon-on-insulator platform for devices which require low insertion loss and high power handling capability. Preliminary results including silicon nitride growth, high-Q resonator fabrication, and vertical integration are presented.
Keywords :
integrated optics; optical losses; silicon compounds; silicon-on-insulator; wide band gap semiconductors; SiN; Absorption; Annealing; Microcavities; Optical waveguides; Silicon; Silicon compounds; silicon nitride; silicon-on-insulator; vertical;
Conference_Titel :
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0826-8
DOI :
10.1109/GROUP4.2012.6324167
