Title :
Measurements and predictions of SAW parameters and device performance on LGT-X substrates
Author :
Malocha, D.C. ; Cunha, M. Pereirada ; Adler, E.L. ; Puccio, D. ; Knapp, K.
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Central Florida Univ., Orlando, FL, USA
fDate :
6/23/1905 12:00:00 AM
Abstract :
SAW material parameters have been extracted for LGT X-cut material at various propagation angles. The extracted parameters of velocity, coupling and TCD give good correlation to predicted results based on fundamental LGT material measurements previously reported. SAW delay lines, resonators and transversely coupled resonator (TCR) have been fabricated and the initial results from experiments are presented. The results indicate that the LGT material parameters previously reported will yield reliable predictions, although the precise temperature effects are not at the same level of refinement as in quartz. Based on device results, the current LGT material used is of a high quality and suitable for SAW device applications
Keywords :
Q-factor; S-parameters; capacitance; substrates; surface acoustic wave devices; LGT X-cut material; LGT material parameters; LTG-X single crystal substrates; S-parameter measurements; SAW delay lines; SAW material parameters; SAW resonators; TCD; TCR; coupling; parameter extraction; propagation angles; static transducer capacitance; temperature coefficient of delay; temperature effects; transversely coupled resonator; velocity; Delay lines; Electrical resistance measurement; Frequency measurement; Probes; Radio frequency; Scattering parameters; Surface acoustic wave devices; Surface acoustic waves; Testing; Transducers;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-7028-7
DOI :
10.1109/FREQ.2001.956189