• DocumentCode
    1628598
  • Title

    Stress, temperature and pressure behavior of SAW on langasite plates

  • Author

    Taziev, Rinat M.

  • Author_Institution
    Inst. of Semicond. Phys., Acad. of Sci., Novosibirsk, Russia
  • fYear
    2001
  • fDate
    6/23/1905 12:00:00 AM
  • Firstpage
    227
  • Lastpage
    234
  • Abstract
    Langasite is a new piezoelectric material for high temperature sensor applications. This material possesses higher pressure sensitivity for SAW than that in alpha-quartz crystal. There are also cuts with extremely low sensitivity to pressure, all-round force compressing and change a temperature of langasite plates. In this work a detailed analysis of sensitivity of SAW resonator on the surface of langasite plates to pressure loading, temperature change and all-round force compressing of circle plate are presented. The influence of external static forces on the SAW velocity is computed in a case of circular plates (membranes). Pressure and radial in-plane stress sensitivities of the SAW velocity at any point on the surface of thin membrane as a function of langasite crystal anisotropy are presented by sensitivity contour mapping from two independent variables: direction of the SAW propagation and cut angles of langasite substrate
  • Keywords
    gallium compounds; lanthanum compounds; piezoelectric materials; pressure sensors; surface acoustic wave resonators; surface acoustic wave sensors; surface acoustic waves; La3Ga5SiO14; SAW; all-round force compressing; circular plates; crystal anisotropy; external static forces; high temperature sensor; langasite plates; langasite resonator; membranes; piezoelectric material; pressure loading; pressure sensitivity; sensitivity contour mapping; stress sensitivities; temperature change; Acoustic sensors; Acoustic waves; Biomembranes; Crystalline materials; Physics; Piezoelectric materials; Stability; Stress; Surface acoustic waves; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
  • Conference_Location
    Seattle, WA
  • ISSN
    1075-6787
  • Print_ISBN
    0-7803-7028-7
  • Type

    conf

  • DOI
    10.1109/FREQ.2001.956193
  • Filename
    956193