Title :
Stress, temperature and pressure behavior of SAW on langasite plates
Author :
Taziev, Rinat M.
Author_Institution :
Inst. of Semicond. Phys., Acad. of Sci., Novosibirsk, Russia
fDate :
6/23/1905 12:00:00 AM
Abstract :
Langasite is a new piezoelectric material for high temperature sensor applications. This material possesses higher pressure sensitivity for SAW than that in alpha-quartz crystal. There are also cuts with extremely low sensitivity to pressure, all-round force compressing and change a temperature of langasite plates. In this work a detailed analysis of sensitivity of SAW resonator on the surface of langasite plates to pressure loading, temperature change and all-round force compressing of circle plate are presented. The influence of external static forces on the SAW velocity is computed in a case of circular plates (membranes). Pressure and radial in-plane stress sensitivities of the SAW velocity at any point on the surface of thin membrane as a function of langasite crystal anisotropy are presented by sensitivity contour mapping from two independent variables: direction of the SAW propagation and cut angles of langasite substrate
Keywords :
gallium compounds; lanthanum compounds; piezoelectric materials; pressure sensors; surface acoustic wave resonators; surface acoustic wave sensors; surface acoustic waves; La3Ga5SiO14; SAW; all-round force compressing; circular plates; crystal anisotropy; external static forces; high temperature sensor; langasite plates; langasite resonator; membranes; piezoelectric material; pressure loading; pressure sensitivity; sensitivity contour mapping; stress sensitivities; temperature change; Acoustic sensors; Acoustic waves; Biomembranes; Crystalline materials; Physics; Piezoelectric materials; Stability; Stress; Surface acoustic waves; Temperature sensors;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-7028-7
DOI :
10.1109/FREQ.2001.956193