The volume-metrical monolithic integrated circuits for microwave band

The main principles of volume-metrical microwave monolithic ICs design are discussed. The essential features are the following: (1) microwave transmission lines should be chosen adequately providing the best total performance for each functional element and/or block; and (2) it is important to involve 3 space dimensions in the electromagnetic signal processing. In this case interlayer signal transmission can be obtained by means of local couplings. The coupling element could be also used as a processing tool. A set of technological contradictions appeared when approaching submillimeter band are pointed out. We discuss the physical and technological design principles for basic waveguide and resonant elements. Attention is also paid to the main functional elements for volume-metrical microwave ICs based on semi-isolating GaAs. The CAM/CAD methods are included too. Sample elements are investigated and the results are shown