Title :
Lattice defects properties of synthetic quartz crystals grown from various rotated Y-cut seed plates
Author :
Kurashige, Masakazu ; Usami, Yoko ; Oba, Kenji ; Hattanda, Masahiro
Author_Institution :
Kinseki Ltd., Tokyo, Japan
fDate :
6/23/1905 12:00:00 AM
Abstract :
Lattice defects in synthetic quartz crystals grown from various rotated Y-cut seed plates are studied. Dislocation density, OH- concentration (alpha value), Al and Na concentrations, and other information are discussed in this paper. The states of these lattice defects included in each grown crystal are changed by their seed orientation
Keywords :
X-ray topography; absorption coefficients; crystal growth from solution; dislocation density; dislocation nucleation; impurity distribution; piezoelectric materials; quartz; OH- concentration; SAW wafer; SiO2; X-ray topography; Z-bar crystals; absorption coefficients; alpha values; dislocation density; gamma ray darkening; impurity concentrations; large-scaled autoclaves; lattice defects; rotated Y-cut seed plates; seed orientation; synthetic quartz crystals; Artificial intelligence; Bars; Crystals; IEC standards; Industrial control; Lattices; Process control; Shape control; Surface acoustic waves; Surface morphology;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-7028-7
DOI :
10.1109/FREQ.2001.956206