Title :
Gate chain structures with on-chip clock generators for realistic high-speed dynamic stress
Author :
Shiono, Noboru ; Mizusawa, Takeshi
Author_Institution :
NTT LSI Labs., Kanagawa, Japan
Abstract :
NAND and NOR gate chains including on-chip frequency variable clock generators are presented as a way of evaluating hot-electron-induced degradation of CMOS performance under realistic high-speed dynamic stress. Dual gate chains with a common input clock are suitable for measuring net gate delay time by subtracting the delay times of the two chains with different numbers of stages. Operating gate chains at higher frequencies and elevated supply voltages accelerates hot-electron-induced degradation of circuit performance to yield useful information for estimating lifetimes under normal-use conditions and realistic dynamic stress. Aluminum NAND gate chains with aluminum interconnect line loads are also suitable for estimating electromigration failure of aluminum lines in actual circuits through high-frequency operation and elevated temperature
Keywords :
CMOS integrated circuits; NAND circuits; NOR circuits; circuit reliability; delays; electromigration; hot carriers; integrated circuit testing; integrated logic circuits; logic gates; 10 MHz; Al interconnect lines; CMOS performance; NAND and NOR gate chains; NAND gate chains; common input clock; dual gate chains; electromigration failure; elevated supply voltages; elevated temperature; frequency variable clock generators; gate delay time; high-frequency operation; high-speed dynamic stress; hot-electron-induced degradation; onchip generators; Acceleration; Aluminum; Circuit optimization; Clocks; Degradation; Delay effects; Frequency estimation; Stress; Time measurement; Voltage;
Conference_Titel :
Microelectronic Test Structures, 1991. ICMTS 1991. Proceedings of the 1991 International Conference on
Conference_Location :
Kyoto
Print_ISBN :
0-87942-588-1
DOI :
10.1109/ICMTS.1990.161755