Ultra small AT-cut quartz resonators at 155.52 MHz made by a batch process

Author

Wüthrich, Christian ; Piazza, Silvio Dalla ; Rüedi, Urs ; Studer, Bruno

Author_Institution

Asulab, Marin, Switzerland

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

396

Lastpage

399

Abstract

AT-cut High Frequency Fundamental mode quartz resonators at 155.52 MHz have been fabricated using a batch process. The devices are 0.82 mm wide and 2.7 mm long. Specific problems like quality factor or flexure modes relating to the small size of the device are presented. The quality factor of finished devices can be as high as 50000 with a C1 of 1fF. Devices with a C1 of 4fF have a series resistance of 40 W. Accelerated ageing measurement shows a good stability of the frequency while thermal measurement does not show the presence of activity dips

Keywords

crystal resonators; electron device manufacture; electron device testing; stability; 0.82 mm; 150 MHz; 155.52 MHz; 2.7 mm; 40 ohm; AT-cut quartz resonators; SiO₂; accelerated ageing; batch process; flexure modes; length 2.7 mm; quality factor; series resistance 400 Ω; stability; thermal measurement; width 0.82 mm; Aging; Aluminum; Biomembranes; Chromium; Electrical resistance measurement; Electrodes; Etching; Frequency; Gold; Q factor;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International

Conference_Location

Seattle, WA

ISSN

1075-6787

Print_ISBN

0-7803-7028-7

Type

conf

DOI

10.1109/FREQ.2001.956258

Filename

956258