Dynamic calibration of laminar flow sensor for gases

Recently, the unsteady flow rate measurement of gases is very important in various industrial fields. In this paper, we examined theoretically and experimentally the dynamic characteristics of a laminar flow sensor for gases which we developed. At first, we examined static characteristics of laminar flow sensor experimentally. We evaluated the influence of inlet region and the linear characteristic between volumetric flow rate and pressure difference. Moreover, dynamic characteristics of this laminar flow sensor have been measured experimentally using an unsteady flow generator with isothermal chamber. As a result, we confirmed the flow sensor can be measured oscillatory flow up to 50 [Hz] and the laminar flow sensor has phase-lead characteristic.