DocumentCode :
1630748
Title :
Quantum 1/f effect in piezoelectric sensors
Author :
Handel, Peter H.
Author_Institution :
Dept. of Phys. & Astron., Missouri Univ., St. Louis, MO, USA
fYear :
2001
fDate :
6/23/1905 12:00:00 AM
Firstpage :
430
Lastpage :
437
Abstract :
Piezoelectric sensors used for the detection of chemical agents and for electronic nose instruments are based on BAW and SAW resonators. They are also useful in the detection of biological agents, and can be specific, particularly if the sensitive surface is activated with the right antigen. The BAW resonators are used for instance in the "quartz crystal microbalance" (QCM). This is usually a polymer-coated resonating quartz disk, a few mm in diameter, with smaller diameter metal electrodes on each side and with quality factor Q. The resonance frequency is usually in the 10-30 MHz range. Absorption of gas molecules with mass δm on the surface of the polymer coating gets detected by a reduction of the resonance frequency of the quartz disk, subject also to fundamental quantum 1/f frequency fluctuations. The quantum 1/f limit of detection is given by the quantum 1/f formula for quartz resonators. To optimize the device we must avoid closeness of the crystal volume to the phonon coherence length which corresponds to the maximum error and minimal sensitivity situation. Differential measurements that include a reference resonator without polymer coating can effectively eliminate temperature fluctuations, power supply instability, etc. Adsorbed masses below the pg range can be detected. Similarity, SAW resonators are used at about ten times higher frequencies in small sensors that operate best with sizes larger than the phonon coherence length. The discussion is similar, but applied to the surface and surface waves
Keywords :
1/f noise; Q-factor; bulk acoustic wave devices; chemical sensors; crystal resonators; fluctuations; gas sensors; microbalances; microsensors; phonons; piezoelectric transducers; quantum noise; quartz; silicon; surface acoustic wave resonators; surface acoustic wave sensors; 1/f frequency fluctuations; 10 to 30 MHz; BAW resonators; MEMS resonators; SAW resonators; SiO2; biological agents; chemical agents; differential measurements; electronic nose instruments; gas molecules absorption; microelectromechanical systems resonators; phonon coherence length; piezoelectric sensors; polymer-coated resonating quartz disk; quality factor; quantum 1/f effect; quartz crystal microbalance; quartz resonators; resonance frequency; sensitivity; Biosensors; Chemical and biological sensors; Chemical sensors; Fluctuations; Phonons; Polymer films; Resonance; Resonant frequency; Surface acoustic waves; Surface waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
Conference_Location :
Seattle, WA
ISSN :
1075-6787
Print_ISBN :
0-7803-7028-7
Type :
conf
DOI :
10.1109/FREQ.2001.956267
Filename :
956267
Link To Document :
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