Gas sensor using high-frequency quartz crystal microbalance

Author

Kurosawa, Shigeru ; Han, Dae-Sang ; Park, Jong-Won ; Aizawa, Hidenobu ; Yoshimoto, Minoru ; Nakamura, Chikashi ; Miyake, Jun ; Chang, Sang-Mok

Author_Institution

Photonics Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

462

Lastpage

464

Abstract

Fundamental modes (9 & 50 MHz) and overtone modes of 3rd mode of 33 MHz (100(3) MHz) and 5th mode of 20 MHz (100(5) MHz) of quartz crystal microbalances. (QCMs) with high frequencies are studied to increase the frequency response of QCM gas-sensor. On the fundamental and overtone modes, the ratio of mass sensitivity of QCMs calculated from theory is consistent with that of the experimental results

Keywords

crystal resonators; frequency response; gas sensors; microbalances; 20 MHz; 33 MHz; 50 MHz; 9 MHz; QCM gas-sensor; SiO₂; frequency response; frequency shift; fundamental modes; high-frequency quartz crystal microbalance; mass sensitivity; overtone modes; piezoelectric quartz crystal; plasma polymerization; Chemicals; Electrodes; Equations; Frequency response; Gas detectors; Photonic integrated circuits; Piezoelectric films; Plasma chemistry; Plasma materials processing; Polymer films;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International

Conference_Location

Seattle, WA

ISSN

1075-6787

Print_ISBN

0-7803-7028-7

Type

conf

DOI

10.1109/FREQ.2001.956274

Filename

956274