Liquid sensor probe using complete reflection at free edge of shear horizontal mode surface acoustic wave

An edge-reflecting liquid SAW sensor probe based on the SH-SAW device and a tentative implementation system for the sensor probe has been proposed. Experiments using the 36°YX LiTaO₃ substrate have shown that the SH-SAW wave, which is reflected at the perpendicular edge, attenuates in the liquid in proportion to the propagation length. Moreover, it has shown that the amplitude of the reflected wave at the interface between the liquid and the edge is proportional to the square root of the product of the viscosity and density of the liquid. It has also been shown that the grating wave-guide eliminates SSBW, thereby facilitating the measurement of the electrical characteristics. Finally, a tentative system configuration suitable for the reflecting SH-SAW sensor was proposed