Hysteresis characteristics vs relative humidity for AT-Cut quartz humidity sensors

Author

Kuroiwa, Mayumi ; Shimamoto, Yoshiro ; Yasuda, Yuji ; Wakamoto, Satoru ; NAKAZAWA, Mitsuo

Author_Institution

Fac. of Eng., Shinshu Univ., Nagano, Japan

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

492

Lastpage

496

Abstract

This paper describes experiments regarding the hysteresis of relative humidity on AT-cut quartz humidity sensors. This research was conducted to investigate principally the mechanism with respect to frequency change, etc. (including the impedance changes and equivalent circuit constant fluctuations) for the above humidity sensors

Keywords

adsorption; crystal resonators; equivalent circuits; humidity sensors; hysteresis; quartz; AT-cut quartz humidity sensors; SiO₂; adsorption of water molecules; circular plano-convex plate resonators; electrode films; equivalent circuit constant fluctuations; frequency change; hysteresis characteristics; impedance changes; quartz resonator; relative humidity; series resonance frequencies; transformation equivalent circuit; Electrodes; Equivalent circuits; Gold; Humidity measurement; Hysteresis; Impedance; Radio frequency; Resonant frequency; Sensor phenomena and characterization; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International

Conference_Location

Seattle, WA

ISSN

1075-6787

Print_ISBN

0-7803-7028-7

Type

conf

DOI

10.1109/FREQ.2001.956283

Filename

956283