A high resolution 3D surface profiling system

Author

Srinivasan, V. ; Ong, S.H. ; Lam, C.P.

Author_Institution

Dept. of Electr. Eng., Nat. Univ. of Singapore, Singapore

fYear

1990

Firstpage

494

Abstract

An improved version of the structured sine wave illuminated 3D vision system has been developed in order to obtain depth resolution better than 0.05 mm. Errors generated by local imperfections in the sine wave grating have been compensated for in order to achieve this resolution. The method uses a collimated laser beam for illumination of the surface. It is sinusoidally intensity-modulated along a transverse direction by a grating. An image of the surface is recorded by a camera placed at an angle with respect to the incident laser beam. The depth change of the surface, from pixel to pixel, is measured by phase modulation of the sinusoidal intensity distribution. Test measurements are presented

Keywords

computerised picture processing; inspection; measurement by laser beam; surface topography measurement; collimated laser beam; grating; high resolution 3D surface profiling system; sine wave grating; sinusoidal intensity-modulation; structured sine wave illuminated 3D vision system; Cameras; Collimators; Gratings; Laser beams; Lighting; Machine vision; Phase measurement; Phase modulation; Surface emitting lasers; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Electronics Society, 1990. IECON '90., 16th Annual Conference of IEEE

Conference_Location

Pacific Grove, CA

Print_ISBN

0-87942-600-4

Type

conf

DOI

10.1109/IECON.1990.149189

Filename

149189