Title :
Young´s modulus detection of low-a film by laser-generated surface acoustic waves with improved matching algorithm
Author :
Shan, Xing-Meng ; Xiao, Xia ; Liu, Ya-Liang
Author_Institution :
Sch. of Electron. & Inf. Eng., Tianjin Univ., Tianjin, China
Abstract :
Laser-generated surface acoustic waves (LSAWs) technique is a nondestructive method for the determination of Young´s modulus of thin fragile low dielectric constant (low-k) films. In some cases, there are errors which cannot be ignored of the experiment measuring dispersion curves. Therefore, an improved matching algorithm is proposed to solve this problem by aligning the theoretical dispersion curve with the experimental one. The low-k film sample with SiOCH material deposited on Si (100) plane substrate is detected in the experiment. The result indicates that the Young´s modulus of thin low-k films could be successfully determined by LSAWs technique with the improved matching algorithm.
Keywords :
Young´s modulus; low-k dielectric thin films; permittivity; silicon; surface acoustic waves; Si; Young modulus detection; improved matching algorithm; laser-generated surface acoustic waves; low-k film; thin fragile low dielectric constant films;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-5797-7
DOI :
10.1109/ICSICT.2010.5667517
