Title :
Comparing various types of minienvironments
Author_Institution :
Minienviron. & Autom. Res. Center, Asyst Technol. Inc., Milpitas, CA, USA
Abstract :
The application of minienvironment-based isolation technology for the reduction and control of particulate contamination levels has progressed from the development and evaluation stages to its current status as a preferred alternative for new semiconductor manufacturing facilities. This paper examines various types of minienvironments currently used in existing and new semiconductor manufacturing facilities including, ceiling-hung or ceiling-suspended, self-powered, floor-supported with a fan-filter module, and tool-integrated minienvironments. This paper also examines and compares various parameters affecting the semiconductor manufacturing operations such as ergonomics, flexibility, performance and cost and discusses the integration of minienvironments into the facility
Keywords :
integrated circuit manufacture; ceiling-hung minienvironment; ceiling-suspended minienvironment; cost; ergonomics; fan-filter module; flexibility; floor-supported minienvironment; isolation technology; minienvironments; particulate contamination; self-powered minienvironment; semiconductor manufacturing facilities; tool-integrated minienvironment; Automatic control; Chemical vapor deposition; Costs; Humidity control; Isolation technology; Manufacturing processes; Production facilities; Silicon; Sputtering; Surface contamination;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-2053-0
DOI :
10.1109/ASMC.1994.588163
