Title :
Effects of plasma treatment on high-field conduction and breakdown of poly-p-xylylene thin films
Author :
Mizutani, Teruyoshi ; Mori, Tatsuo ; Ieda, Masayuki
Author_Institution :
Nagoya Univ., Japan
Abstract :
The high-field behavior and breakdown of poly-p-xylylene (PPX) thin films into which defects were introduced by treatment in an Ar plasma were studied. Some of the defects act as scattering or trapping centers. The high-field current in the film was suppressed considerably by the plasma treatment. The plasma treatment increased the breakdown strength of PPX from 7 MV/cm to 10 MV/cm. A comparison between results for poly-2-chloro-p-xylene (PCPX) and the plasma-treated PPX films revealed that some of the defects introduced by the treatment suppressed the high-field current more effectively than the chlorine atoms in PCPX. Moreover, the plasma treatment raised the breakdown strength of PPX without a large increase in dielectric loss
Keywords :
dielectric losses; electric breakdown of solids; electroluminescence; electron traps; high field effects; luminescence of organic solids; organic insulating materials; polymer films; surface treatment; Ar plasma; breakdown strength; dielectric loss; electroluminescence; high-field behavior; plasma treatment; poly-2-chloro-p-xylene; poly-p-xylylene thin films; trapping centers; Electric breakdown; Electrodes; Glass; Plasma chemistry; Plasma measurements; Plasma temperature; Polymer films; Substrates; Temperature dependence; Transistors;
Conference_Titel :
Conduction and Breakdown in Solid Dielectrics, 1989., Proceedings of the 3rd International Conference on
Conference_Location :
Trondheim
DOI :
10.1109/ICSD.1989.69224
