• DocumentCode
    1635992
  • Title

    Multi-axis integrated CMOS-MEMS inertial sensors

  • Author

    Xie, Huikai ; Sun, Hongzhi ; Jia, Kemiao ; Fang, Deyou ; Qu, Hongwei

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
  • fYear
    2010
  • Firstpage
    1394
  • Lastpage
    1395
  • Abstract
    Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis accelerometer, a z-axis gyroscope and an x/y gyroscope are also introduced.
  • Keywords
    CMOS integrated circuits; gyroscopes; microsensors; units (measurement); DRIE process; integrated 3-axis accelerometer; integrated 5-axis inertial measurement unit; lateral sensing comb drives; multiaxis integrated CMOS-MEMS inertial sensors; portable electronics; vertical sensing comb drives; x-y gyroscope; z-axis gyroscope; Accelerometers; CMOS integrated circuits; Gyroscopes; Metals; Microstructure; Sensors; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-4244-5797-7
  • Type

    conf

  • DOI
    10.1109/ICSICT.2010.5667618
  • Filename
    5667618
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1635992