Title :
Multi-axis integrated CMOS-MEMS inertial sensors
Author :
Xie, Huikai ; Sun, Hongzhi ; Jia, Kemiao ; Fang, Deyou ; Qu, Hongwei
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
Abstract :
Multi-axis integration of inertial sensors is crucial for portable electronics. This paper presents a DRIE CMOS MEMS process that is capable of realizing lateral and vertical sensing comb drives. An integrated 3-axis accelerometer and an integrated 5-axis inertial measurement unit including a 3-axis accelerometer, a z-axis gyroscope and an x/y gyroscope are also introduced.
Keywords :
CMOS integrated circuits; gyroscopes; microsensors; units (measurement); DRIE process; integrated 3-axis accelerometer; integrated 5-axis inertial measurement unit; lateral sensing comb drives; multiaxis integrated CMOS-MEMS inertial sensors; portable electronics; vertical sensing comb drives; x-y gyroscope; z-axis gyroscope; Accelerometers; CMOS integrated circuits; Gyroscopes; Metals; Microstructure; Sensors; Silicon;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-5797-7
DOI :
10.1109/ICSICT.2010.5667618
