DocumentCode
1637219
Title
AlGaN/GaN dual gate MOS HFET for power device applications
Author
Gong, Rumin ; Wang, Jinyan ; Liu, Shenghou ; Dong, Zhihua ; Wen, Cheng P. ; Yu, Min ; Cai, Yong ; Zhang, Baoshun
Author_Institution
Insititute of Microelectron., Peking Univ., Beijing, China
fYear
2010
Firstpage
1353
Lastpage
1355
Abstract
Dual gate AlGaN/GaN MOS HFET with Al2O3 as gate oxide layer was fabricated. In comparison with normal dual gate Schottky HFET, dual gate MOS HFET exhibits much lower gate leakage current, larger transconductance and output current. Besides, the dual gate MOS HFET shows excellent breakdown characteristic.
Keywords
III-V semiconductors; aluminium compounds; gallium compounds; power MOSFET; Al2O3; AlGaN-GaN; breakdown characteristic; dual gate MOS HFET; gate leakage current; gate oxide layer; output current; power device application; transconductance; Aluminum gallium nitride; Gallium nitride; HEMTs; Leakage current; Logic gates; MODFETs; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location
Shanghai
Print_ISBN
978-1-4244-5797-7
Type
conf
DOI
10.1109/ICSICT.2010.5667654
Filename
5667654
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