DocumentCode
1637233
Title
Photomasks diagnostic in the automated optical inspection system
Author
Krylov, Viktor ; Antoshchuk, Svetlana ; Shcherbakova, Galina
Author_Institution
Odessa Polytech. Nat. Univ., Odessa, Ukraine
fYear
2008
Firstpage
533
Lastpage
534
Abstract
The integrated circuits photo masks diagnostics in the automated optical inspection system is developed. This low error probability system based in application of hyperbolic wavelet transforming and photo masks fiducial geometric moment features. The experimental results proved the high noise stability property, which allows reducing lighting apparatus and high precision mechanism conditions.
Keywords
automatic optical inspection; error statistics; hyperbolic equations; masks; wavelet transforms; automatic optical inspection system; error probability system; geometric moment features; hyperbolic wavelet transforming; integrated circuits photo masks diagnostics; lighting apparatus; noise stability property; Hyperbolic wavelet transforming; alignment; image processing automated optical inspection system; integrated circuits; photo masks;
fLanguage
English
Publisher
ieee
Conference_Titel
Modern Problems of Radio Engineering, Telecommunications and Computer Science, 2008 Proceedings of International Conference on
Conference_Location
Lviv-Slavsko
Print_ISBN
978-966-553-678-9
Type
conf
Filename
5423428
Link To Document