Title :
Photomasks diagnostic in the automated optical inspection system
Author :
Krylov, Viktor ; Antoshchuk, Svetlana ; Shcherbakova, Galina
Author_Institution :
Odessa Polytech. Nat. Univ., Odessa, Ukraine
Abstract :
The integrated circuits photo masks diagnostics in the automated optical inspection system is developed. This low error probability system based in application of hyperbolic wavelet transforming and photo masks fiducial geometric moment features. The experimental results proved the high noise stability property, which allows reducing lighting apparatus and high precision mechanism conditions.
Keywords :
automatic optical inspection; error statistics; hyperbolic equations; masks; wavelet transforms; automatic optical inspection system; error probability system; geometric moment features; hyperbolic wavelet transforming; integrated circuits photo masks diagnostics; lighting apparatus; noise stability property; Hyperbolic wavelet transforming; alignment; image processing automated optical inspection system; integrated circuits; photo masks;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications and Computer Science, 2008 Proceedings of International Conference on
Conference_Location :
Lviv-Slavsko
Print_ISBN :
978-966-553-678-9
