Approximate analysis of optical properties for ZnO rough surfaces

TCO (Transparent Conductive Oxides) layers often exhibit very rough surfaces and their optical properties, can not be described by one dimensional analytical models and numerical approaches must be adopted. However, computational time becomes, often, too large. In this paper we propose an automated procedure, based on the interaction between MATLAB and the Sentaurus TCAD environment which finds, in a generic rough surface, the smallest area characterized by the same statistical features of the whole surface so that full 3D analysis can be performed.