Designing geometry for the circular transmission line model to determine sheet resistance under contacts

Author

Collins, Andrew ; Pan, Yongping ; Holland, Andrew

Author_Institution

Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, VIC, Australia

fYear

2014

fDate

12-14 May 2014

Firstpage

311

Lastpage

314

Abstract

The Circular Transmission Line Model (CTLM) can be used as a convenient tool for determining the sheet resistance under an ohmic contact. However the model assumes that electrodes are at an equipotential and in order to examine this assumption, an investigation has been undertaken to show the minimum requirements for attaining reliable measurements. Using test structures of nickel deposited on germanium it has been shown that the geometry of the structure has a significant impact on results obtained. In addition to this, care should be taken when testing samples to ensure that suitable probe positions and a sufficient number of probes are used.

Keywords

electric resistance measurement; electrodes; finite element analysis; germanium; nickel; ohmic contacts; transmission lines; CTLM; Ge; Ni; circular transmission line model; electrodes; geometry; germanium; nickel; ohmic contact; sheet resistance; Contact resistance; Current measurement; Electrical resistance measurement; Electrodes; Metals; Probes; Transmission line measurements;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics Proceedings - MIEL 2014, 2014 29th International Conference on

Conference_Location

Belgrade

Print_ISBN

978-1-4799-5295-3

Type

conf

DOI

10.1109/MIEL.2014.6842151

Filename

6842151