Title :
CMOS monolithic atomic force microscope
Author :
Barrettino, D. ; Hafizovic, S. ; Volden, T. ; Sedivy, Jan ; Kirstein, K. ; Hierlemann, A. ; Baltes, H.
Author_Institution :
Phys. Electron. Lab., Swiss Fed. Inst. of Technol., Zurich, Switzerland
Abstract :
A single-chip atomic force microscope fabricated in industrial CMOS-technology with post-CMOs micromachining is presented, which comprises an array of twelve cantilevers with integrated deflection sensors and actuators, digital proportional-integral-derivative (PID) deflection controllers, amplification stages, offset compensation circuitry, digital filters for sensor-actuator coupling compensation, A/D and D/A converters, dedicated serial lines (one per cantilever) for fast data transfer, and an I2C serial interface for chip programming. Parallel scanning imaging evidenced a height resolution better than 10nm.
Keywords :
CMOS integrated circuits; analogue-digital conversion; atomic force microscopy; microactuators; micromachining; three-term control; 10 nm; A/D converters; CMOS monolithic atomic force microscope; D/A converters; actuators; amplification stages; cantilevers; chip programming; digital filters; digital proportional-integral-derivative deflection controllers; integrated deflection sensors; offset compensation circuitry; post-CMOS micromachining; sensor-actuator coupling compensation; Actuators; Atomic force microscopy; Force control; Force sensors; Industrial control; Micromachining; Pi control; Sensor arrays; Textile industry; Three-term control;
Conference_Titel :
VLSI Circuits, 2004. Digest of Technical Papers. 2004 Symposium on
Print_ISBN :
0-7803-8287-0
DOI :
10.1109/VLSIC.2004.1346597
