Title :
Design and simulation of a high resolution ultrasonic micro-transducer derived by LiNbO3
Author :
Zhang, Jin-ying ; Ji, Xin-ming ; Xu, Wei-jiang ; Carlier, Julien ; Nongaillard, Bertrand ; Huang, Yi-ping
Author_Institution :
Dept. of Microelectron., Fudan Univ., Shanghai, China
Abstract :
A 100 MHz high resolution ultrasonic micro-transducer with a focal lens is designed for medical imaging based on monocrystalline lithium niobate (LiNbO3) 36°/Y-cut. Finite element analysis is used to characterize the impulse response of this transducer and the stationary wave propagation. The results show that the focal lens attributes a lot to the directivity and the resolution. The wave derived by LiNbO3 36°/Y-cut element demonstrates a better property compared with ZnO. The energy of transmitted wave at the focus is increased by 16.53% and 314.7% due to LiNbO3 and the matching layers, respectively.
Keywords :
bioMEMS; biomedical transducers; biomedical ultrasonics; finite element analysis; lithium compounds; transient response; ultrasonic imaging; ultrasonic transducers; LiNbO3; finite element analysis; high resolution ultrasonic microtransducer; lithium niobate based ultrasonic microtransducer; medical imaging; monocrystalline lithium niobate; transducer directivity; transducer impulse response; transducer resolution; transducer stationary wave propagation; ultrasonic microtransducer design; ultrasonic microtransducer focal lens; ultrasonic microtransducer simulation; Acoustics; Biomedical imaging; Finite element methods; Lenses; Materials; Transducers; Zinc oxide;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-5797-7
DOI :
10.1109/ICSICT.2010.5667762
