Title :
Reducing dielectric breakdown in MEMS switches via a CNTs array embedded in a Si3N4 substrate
Author :
Aldrigo, M. ; Dragoman, M.
Author_Institution :
MIMOMEMS Group, IMT, Bucharest, Romania
Abstract :
In the last years, MEMS switches have been gathering an increasing interest for their exploitation in several electrostatic and RF applications. In this paper we discuss about the enhancement of dielectric´s reliability in MEMS by embedding an array of Carbon Nanotubes (CNTs) which allows the reducing of the breakdown threshold and, hence, to improve the device capabilities even in presence of high actuation voltages.
Keywords :
carbon nanotubes; electric breakdown; microswitches; reliability; CNT array; MEMS switches; RF application; actuation voltage; breakdown threshold reduction; carbon nanotubes; device capabilities; dielectric breakdown reduction; dielectric reliability enhancement; electrostatic application; Arrays; Dielectrics; Electric breakdown; Electrodes; Micromechanical devices; Microswitches; Radio frequency; MEMS; breakdown; carbon nanotube; switches;
Conference_Titel :
Semiconductor Conference (CAS), 2014 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4799-3916-9
DOI :
10.1109/SMICND.2014.6966387
