• DocumentCode
    164022
  • Title

    Reducing dielectric breakdown in MEMS switches via a CNTs array embedded in a Si3N4 substrate

  • Author

    Aldrigo, M. ; Dragoman, M.

  • Author_Institution
    MIMOMEMS Group, IMT, Bucharest, Romania
  • fYear
    2014
  • fDate
    13-15 Oct. 2014
  • Firstpage
    47
  • Lastpage
    50
  • Abstract
    In the last years, MEMS switches have been gathering an increasing interest for their exploitation in several electrostatic and RF applications. In this paper we discuss about the enhancement of dielectric´s reliability in MEMS by embedding an array of Carbon Nanotubes (CNTs) which allows the reducing of the breakdown threshold and, hence, to improve the device capabilities even in presence of high actuation voltages.
  • Keywords
    carbon nanotubes; electric breakdown; microswitches; reliability; CNT array; MEMS switches; RF application; actuation voltage; breakdown threshold reduction; carbon nanotubes; device capabilities; dielectric breakdown reduction; dielectric reliability enhancement; electrostatic application; Arrays; Dielectrics; Electric breakdown; Electrodes; Micromechanical devices; Microswitches; Radio frequency; MEMS; breakdown; carbon nanotube; switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2014 International
  • Conference_Location
    Sinaia
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4799-3916-9
  • Type

    conf

  • DOI
    10.1109/SMICND.2014.6966387
  • Filename
    6966387
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=164022