Title :
Trapping centers in heavy ion irradiated silicon
Author :
Palade, Catalin ; Lazanu, Sorina ; Ciurea, Magdalena Lidia
Author_Institution :
Nat. Inst. of Mater. Phys., Magurele, Romania
Abstract :
Low fluence heavy ions incident on high resistivity Si produce lattice defects which act as trapping centers, and produce also an important local field of strain. The strain field intensity increases with the increase of the difference in atomic size and mass between the ion and the Si atom host. We investigate the correlation between the change of trapping parameters and the strain field. The strain field produced by Bi ions in Si is two times more intense than in Si irradiated with I ions, and effects the Gaussian broadening of trapping levels and the temperature dependence of cross sections.
Keywords :
electrical resistivity; elemental semiconductors; ion beam effects; silicon; Gaussian broadening; Si; atomic size; electrical resistivity; heavy ion irradiated silicon; lattice defects; strain field intensity; trapping center; trapping levels; trapping parameter; Bismuth; Charge carrier processes; Ions; Radiation effects; Silicon; Strain; ion irradiation; strain field; thermally stimulated current without bias; traps parameters;
Conference_Titel :
Semiconductor Conference (CAS), 2014 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4799-3916-9
DOI :
10.1109/SMICND.2014.6966411