DocumentCode
164070
Title
Trapping centers in heavy ion irradiated silicon
Author
Palade, Catalin ; Lazanu, Sorina ; Ciurea, Magdalena Lidia
Author_Institution
Nat. Inst. of Mater. Phys., Magurele, Romania
fYear
2014
fDate
13-15 Oct. 2014
Firstpage
125
Lastpage
128
Abstract
Low fluence heavy ions incident on high resistivity Si produce lattice defects which act as trapping centers, and produce also an important local field of strain. The strain field intensity increases with the increase of the difference in atomic size and mass between the ion and the Si atom host. We investigate the correlation between the change of trapping parameters and the strain field. The strain field produced by Bi ions in Si is two times more intense than in Si irradiated with I ions, and effects the Gaussian broadening of trapping levels and the temperature dependence of cross sections.
Keywords
electrical resistivity; elemental semiconductors; ion beam effects; silicon; Gaussian broadening; Si; atomic size; electrical resistivity; heavy ion irradiated silicon; lattice defects; strain field intensity; trapping center; trapping levels; trapping parameter; Bismuth; Charge carrier processes; Ions; Radiation effects; Silicon; Strain; ion irradiation; strain field; thermally stimulated current without bias; traps parameters;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2014 International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4799-3916-9
Type
conf
DOI
10.1109/SMICND.2014.6966411
Filename
6966411
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