• DocumentCode
    164070
  • Title

    Trapping centers in heavy ion irradiated silicon

  • Author

    Palade, Catalin ; Lazanu, Sorina ; Ciurea, Magdalena Lidia

  • Author_Institution
    Nat. Inst. of Mater. Phys., Magurele, Romania
  • fYear
    2014
  • fDate
    13-15 Oct. 2014
  • Firstpage
    125
  • Lastpage
    128
  • Abstract
    Low fluence heavy ions incident on high resistivity Si produce lattice defects which act as trapping centers, and produce also an important local field of strain. The strain field intensity increases with the increase of the difference in atomic size and mass between the ion and the Si atom host. We investigate the correlation between the change of trapping parameters and the strain field. The strain field produced by Bi ions in Si is two times more intense than in Si irradiated with I ions, and effects the Gaussian broadening of trapping levels and the temperature dependence of cross sections.
  • Keywords
    electrical resistivity; elemental semiconductors; ion beam effects; silicon; Gaussian broadening; Si; atomic size; electrical resistivity; heavy ion irradiated silicon; lattice defects; strain field intensity; trapping center; trapping levels; trapping parameter; Bismuth; Charge carrier processes; Ions; Radiation effects; Silicon; Strain; ion irradiation; strain field; thermally stimulated current without bias; traps parameters;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2014 International
  • Conference_Location
    Sinaia
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4799-3916-9
  • Type

    conf

  • DOI
    10.1109/SMICND.2014.6966411
  • Filename
    6966411