Title :
Fabrication of spiral phase plates for optical vortices
Author :
Tudor, Rebeca ; Kusko, Mihai ; Kusko, Cristian ; Craciunoiu, F. ; Avram, Andrei ; Vasilache, Dan
Author_Institution :
Nat. Inst. for R&D in Microtechnol., Bucharest, Romania
Abstract :
This work presents a reproductible fabrication process of spiral phase plates (SPPs) based on microfabrication techniques such as photolithography and reactive ion etching (RIE). The fabricated SPPs operate in the reflection mode in order to generate optical vortices with topological charge m = 2 and m = 4. Structural and functional characterizations prove the optical quality of the fabricated SPP.
Keywords :
diffractive optical elements; light reflection; microfabrication; optical fabrication; optical testing; optical vortices; photolithography; sputter etching; RIE; SPP; functional characterizations; microfabrication techniques; optical quality; optical vortices; photolithography; reactive ion etching; reflection mode; reproductible fabrication process; spiral phase plate fabrication; structural characterizations; topological charge; Etching; Laser beams; Optical device fabrication; Optical diffraction; Optical reflection; Optical vortices; Spirals; optical vortex; spiral phase plate; topological charge;
Conference_Titel :
Semiconductor Conference (CAS), 2014 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4799-3916-9
DOI :
10.1109/SMICND.2014.6966416
