Title :
Raman spectroscopy investigation of electron beam irradiated graphene
Author :
Florin, C.C. ; Dinescu, A. ; Purica, M.
Author_Institution :
Nat. Inst. for R&D in Microtechnol. (IMT- Bucharest), Bucharest, Romania
Abstract :
Structural modification of graphene after direct electron beam irradiation (acceleration voltages of 3 kV and 5 kV and exposure doses 200, 400, 800 μC/cm2) has been investigated by using micro-Raman spectroscopy. The amplitudes ratio - ID/IG and I2D/IG versus exposure doses for each acceleration voltage extracted from Raman spectra acquisitions with red laser (633 nm) are evidencing the increasing degradation of single layer graphene at low exposure doses.
Keywords :
Raman spectra; electron beam effects; graphene; C; electron beam irradiated graphene; microRaman spectra; red laser; structural modification; voltage 3 kV; voltage 5 kV; Acceleration; Electron beams; Graphene; Lattices; Radiation effects; Raman scattering; Scanning electron microscopy; Graphene structure; Raman Spectroscopy; SEM; electron beam irradiation;
Conference_Titel :
Semiconductor Conference (CAS), 2014 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4799-3916-9
DOI :
10.1109/SMICND.2014.6966417