Membrane supported circuits for millimeter wave applications

This paper presents a series of passive millimeter wave membrane supported circuits recently developed by the authors. Double folded slot antennas, band pass filters and band stop resonators are designed and fabricated by wet or dry etching of silicon. Flexible models are used for full-wave 3D electromagnetic simulations. The accuracy of the models is validated by measurement results. Membrane supported antennas with operating frequencies up to 220 GHz showed wide bandwidths with directivities of 6.5-7.5 dBi. The membrane supported band pass filters showed measured losses of 3.7 dB in the W band, while the band stop resonator has a measured rejection loss of - 30 dB at 30 GHz.