DocumentCode
164109
Title
Power supply architecture for high temperature chuck systems
Author
Teodorescu, Laurentiu ; Gheorghe, Andrei-Sorin ; Draghici, F. ; Brezeanu, G. ; Rusu, Irena
Author_Institution
Univ. Politeh. of Bucharest, Bucharest, Romania
fYear
2014
fDate
13-15 Oct. 2014
Firstpage
193
Lastpage
196
Abstract
A supply technique used for an electric heating resistor mounted inside a thermal chuck system which supports wafer testing in high temperatures domain is described in this paper. Following this technique, a platform for low noise wafer measurements may be develop.
Keywords
electric heating; resistors; semiconductor device testing; thermal management (packaging); electric heating resistor; high temperature chuck systems; low noise wafer measurements; power supply architecture; thermal chuck system; wafer testing; Heating; Microcontrollers; Noise; Power supplies; Temperature measurement; Voltage control; Voltage measurement; low noise measurements; thermal chuck; thermal management; wafer testing; wide band semiconductor testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2014 International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4799-3916-9
Type
conf
DOI
10.1109/SMICND.2014.6966432
Filename
6966432
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