Silicon based electrode arrays

Author

Ash, R.B. ; Wortman, J.J. ; Nagle, H.T. ; Buchanan, J.W.

Author_Institution

Dept. of Electr. & Comput. Eng., North Carolina State Univ., Raleigh, NC, USA

fYear

1989

Firstpage

210

Abstract

The manufacture of a three-dimensional, silicon-based, high-density electrode array with potential biomedical applications is described. Microelectronic fabrication techniques are used to produce an array of regularly spaced electrodes with sensing sites on the order of tens of micrometers. This electrode array consists of a pin-cushion of silicon posts set in an insulating substrate and plated with thin-film conductors and dielectrics. Since it is based on silicon, the array is suitable for integrated data processing and multiplexing, which would allow a large number of electrodes to be monitored simultaneously

Keywords

biological techniques and instruments; electrocardiography; microelectrodes; 3D high-density electrode array; ECG; Si based electrode arrays; biomedical electrode array; dielectrics; insulating substrate; integrated data processing; microelectrode fabrication techniques; multiplexing; pin-cushion; regularly spaced electrodes; thin-film conductors; Biomedical electrodes; Conductive films; Dielectric substrates; Dielectric thin films; Dielectrics and electrical insulation; Fabrication; Manufacturing; Microelectronics; Semiconductor thin films; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, 1989. Images of the Twenty-First Century., Proceedings of the Annual International Conference of the IEEE Engineering in

Conference_Location

Seattle, WA

Type

conf

DOI

10.1109/IEMBS.1989.95685

Filename

95685