Title :
Silicon based electrode arrays
Author :
Ash, R.B. ; Wortman, J.J. ; Nagle, H.T. ; Buchanan, J.W.
Author_Institution :
Dept. of Electr. & Comput. Eng., North Carolina State Univ., Raleigh, NC, USA
Abstract :
The manufacture of a three-dimensional, silicon-based, high-density electrode array with potential biomedical applications is described. Microelectronic fabrication techniques are used to produce an array of regularly spaced electrodes with sensing sites on the order of tens of micrometers. This electrode array consists of a pin-cushion of silicon posts set in an insulating substrate and plated with thin-film conductors and dielectrics. Since it is based on silicon, the array is suitable for integrated data processing and multiplexing, which would allow a large number of electrodes to be monitored simultaneously
Keywords :
biological techniques and instruments; electrocardiography; microelectrodes; 3D high-density electrode array; ECG; Si based electrode arrays; biomedical electrode array; dielectrics; insulating substrate; integrated data processing; microelectrode fabrication techniques; multiplexing; pin-cushion; regularly spaced electrodes; thin-film conductors; Biomedical electrodes; Conductive films; Dielectric substrates; Dielectric thin films; Dielectrics and electrical insulation; Fabrication; Manufacturing; Microelectronics; Semiconductor thin films; Silicon;
Conference_Titel :
Engineering in Medicine and Biology Society, 1989. Images of the Twenty-First Century., Proceedings of the Annual International Conference of the IEEE Engineering in
Conference_Location :
Seattle, WA
DOI :
10.1109/IEMBS.1989.95685
