DocumentCode
1642346
Title
Micro-semiconductor tactile sensor for the automatic obstacle-avoidance system of endoscope
Author
Linyong, Shen ; Jinwu, Qian ; Zhen, Zhang ; Yanan, Zhang ; Jinxi, Yin
Author_Institution
Sch. of Mechatronics Eng. & Autom., Shanghai Univ., China
fYear
2004
Firstpage
181
Lastpage
184
Abstract
The paper studies a tactile sensor. This micro-semiconductor tactile sensor is made of silicon and can be used for the automatic obstacle-avoidance system of endoscope. This paper presents details of the principle of the micro silicon semiconductor sensor at first. Then its design is presented. The application of the sensor in intelligent endoscope system which uses MEMS technology is also explained. At last, the experiment results and analysis are presented.
Keywords
elemental semiconductors; endoscopes; microsensors; semiconductor devices; silicon; tactile sensors; MEMS technology; Si; intelligent endoscope; micro silicon semiconductor; obstacle avoidance; sensor design; tactile sensor; Colon; Colonoscopy; Endoscopes; Immune system; Intelligent sensors; Intelligent systems; Piezoresistance; Silicon; Tactile sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
High Density Microsystem Design and Packaging and Component Failure Analysis, 2004. HDP '04. Proceeding of the Sixth IEEE CPMT Conference on
Print_ISBN
0-7803-8620-5
Type
conf
DOI
10.1109/HPD.2004.1346695
Filename
1346695
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