Title :
Experimental investigation of a small, compact, single mode, side feed microwave plasma source
Author :
Khan, Affan Hasan ; Perrin, M. ; Asmussen, J.
Author_Institution :
Michigan State Univ., East Lansing, MI, USA
Abstract :
Summary form only given. Microwave cavity coupled plasma sources in various geometrical configurations have been extensively experimentally evaluated for quite a some time in a quest for an optimum performance. In sequel, a compact cylindrical plasma source with 8.9 cm inner diameter microwave cavity supporting TE/sub 111/ mode has been designed and evaluated by L. Mahoney at MSU. Early investigations were directed towards evaluation of this plasma source in broad beam applications. The focus of this investigation is to understand the electromagnetic coupling behavior, determine the strength and spatial distribution of the internal electric fields, and to calculate the plasma source performance figures of merit.
Keywords :
microwave devices; plasma filled waveguides; plasma instability; plasma production; 0.3 to 8 mtorr; 2.45 GHz; 50 to 250 W; 8.9 cm; TE/sub 111/ mode; broad beam applications; electromagnetic coupling behavior; geometrical configurations; internal electric field; microwave cavity; microwave cavity coupled plasma sources; optimum performance; plasma source performance figures of merit; small compact single mode side feed microwave plasma source; spatial distribution; Applicators; Conductivity; Electromagnetic heating; Fault location; Feeds; Ion sources; Magnetic field measurement; Plasma sources; Probes; Radiography;
Conference_Titel :
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location :
Raleigh, NC, USA
Print_ISBN :
0-7803-4792-7
DOI :
10.1109/PLASMA.1998.677794
