Experimental investigation of a small, compact, single mode, side feed microwave plasma source

Author

Khan, Affan Hasan ; Perrin, M. ; Asmussen, J.

Author_Institution

Michigan State Univ., East Lansing, MI, USA

fYear

1998

Firstpage

246

Lastpage

247

Abstract

Summary form only given. Microwave cavity coupled plasma sources in various geometrical configurations have been extensively experimentally evaluated for quite a some time in a quest for an optimum performance. In sequel, a compact cylindrical plasma source with 8.9 cm inner diameter microwave cavity supporting TE/sub 111/ mode has been designed and evaluated by L. Mahoney at MSU. Early investigations were directed towards evaluation of this plasma source in broad beam applications. The focus of this investigation is to understand the electromagnetic coupling behavior, determine the strength and spatial distribution of the internal electric fields, and to calculate the plasma source performance figures of merit.

Keywords

microwave devices; plasma filled waveguides; plasma instability; plasma production; 0.3 to 8 mtorr; 2.45 GHz; 50 to 250 W; 8.9 cm; TE/sub 111/ mode; broad beam applications; electromagnetic coupling behavior; geometrical configurations; internal electric field; microwave cavity; microwave cavity coupled plasma sources; optimum performance; plasma source performance figures of merit; small compact single mode side feed microwave plasma source; spatial distribution; Applicators; Conductivity; Electromagnetic heating; Fault location; Feeds; Ion sources; Magnetic field measurement; Plasma sources; Probes; Radiography;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on

Conference_Location

Raleigh, NC, USA

ISSN

0730-9244

Print_ISBN

0-7803-4792-7

Type

conf

DOI

10.1109/PLASMA.1998.677794

Filename

677794