PID-controller application in the system for variable technological process

Author

Baranov, Simion ; Cojuhari, Irina ; Fiodorov, Ion ; Gorceac, Leonid

Author_Institution

Sci. & Eng. Centre Informinstrument, Chisinau, Moldova

fYear

2014

fDate

15-17 May 2014

Firstpage

7

Lastpage

10

Abstract

This report concerns the automatic control system based on the programmable controller TRM-151-01 of the temperature of semiconductor alloying with zinc and tellurium. The goal of the research is the industrial modernization of the epitaxial growth technology of semiconductor materials in the form of thin multiple layers (inclusively nano-dimensions) with variable values of the electric conductibility.

Keywords

programmable controllers; semiconductor industry; three-term control; PID controller application; automatic control system; electric conductibility; epitaxial growth technology; industrial modernization; programmable controller TRM-151-01; semiconductor alloying; semiconductor materials; tellurium; thin multiple layers; variable technological process; zinc; Educational institutions; Epitaxial growth; Epitaxial layers; Gallium arsenide; Metals; Oscillators; Process control; automation; epitaxial layer; gallium compounds; tellurium alloy; zinc alloy;

fLanguage

English

Publisher

ieee

Conference_Titel

Development and Application Systems (DAS), 2014 International Conference on

Conference_Location

Suceava

Type

conf

DOI

10.1109/DAAS.2014.6842418

Filename

6842418