Title :
The effect of air-damping on the planar MEMS structures
Author :
Wang, Xiaojing ; Liu, Yongwu ; Wang, Min ; Chen, Xiaoyang
Author_Institution :
Sch. of Mechatronics Eng. & Autom., Shanghai Univ., China
Abstract :
Squeeze film damping of a planar micromechanical structure that oscillates in the normal direction to the substrate is investigated. Theoretical models influencing the squeeze film damping has been developed for the transversely oscillating plates. The air-film model has been derived from the modified nonlinear Reynolds equation, where the influence of the gas rarefaction is included. The finite difference method is used to solved the equation. The performance of squeeze film such as the variation of the pressure distribution and the air damping load during the whole period are analysed.
Keywords :
damping; finite difference methods; micromechanical devices; semiconductor device models; air-damping; finite difference method; gas rarefaction; nonlinear Reynolds equation; planar MEMS structures; planar micromechanical structure; pressure distribution; squeeze film damping; Damping; Difference equations; Fluid flow; Frequency; Mechatronics; Micromechanical devices; Microstructure; Nonlinear equations; Performance analysis; Resonance;
Conference_Titel :
High Density Microsystem Design and Packaging and Component Failure Analysis, 2004. HDP '04. Proceeding of the Sixth IEEE CPMT Conference on
Print_ISBN :
0-7803-8620-5
DOI :
10.1109/HPD.2004.1346726
